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Study of controlling threshold voltage (V th) for TiN Gate SOI-CMOS using Minimal Fab
Study of controlling threshold voltage (V th) for TiN Gate SOI-CMOS using Minimal Fab
2020
Hiroshige Kogayu
Kazuhiro Koga
Takeshi Hamamoto
Shuichi Noda
Sommawan Khumpuang
Shiro Hara
Keywords:
Threshold voltage
Optoelectronics
Materials science
Tin
soi cmos
Correction
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