Modeling and estimation of the parameters of the morphology of the surfaces of thin films of nano- and micro-electromechanical systems

Thin-film nano- and micro-electromechanical systems of pressure transducers, experimental and theoretical research methods, and the results of estimation of the parameters of the morphology of the surfaces of films are considered. A model and algorithm for the description of the growth of thin films that takes diffusion into account are developed.