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Effect of Heating Substrates on Deposition Efficiency of Al 2 O 3 Films Formed by Aerosol Deposition Method
Effect of Heating Substrates on Deposition Efficiency of Al 2 O 3 Films Formed by Aerosol Deposition Method
2015
Kazuaki Naoe
Hiroyuki Temmei
Masashi Nishiki
Jumpei Kusukawa
Keywords:
Ion plating
Radiochemistry
Aerosol
Deposition (phase transition)
Pulsed laser deposition
Materials science
Chemical engineering
Deposition (law)
aerosol deposition
Correction
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