Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer.

: This paper presents a design of resonant cavity-based piezoelectric micromachined ultrasonic transducers (PMUTs), including impedance matching tube-integrated (T-) and Helmholtz resonant (HR-) cavity-integrated PMUTs. In addition, equivalent circuit models for single PMUT cell and PMUT array are developed for structural optimization and complex array design. The model-derived results agree well with the FEM results. On the basis of the proposed models, an optimized design is established to achieve high output pressure and a good array working performance. The working performance of arrays that consist of HR-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs) are compared. Results indicate that the HR-PMUT array has a lower crosstalk effect than the traditional C-PMUT array. Furthermore, the highest ultrasonic output pressure of HR-PMUT array at the resonant frequency can be achieved with an increase of up to 163% compared with that of the C-PMUT array because of the liquid amplification effect. Also, the cavity-based design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.