Systematic study of laser ablation with GHz bursts of femtosecond pulses

We report on crater formation, line scribing and cavity milling experiments on Silicon, Copper, Aluminum and stainless steel with GHz bursts of femtosecond pulses. The intra-burst repetition rate has been varied between 0.88 and 3.52 GHz, the number of pulses per burst between 50 and 3200, the burst fluence between 8 and 80 J/cm2. For these experiments, a 100-W femtosecond GHz-burst laser has been developed on an industrial laser basis, delivering a total burst energy up to 1 mJ at 100 kHz, with an adjustable number of pulses per burst. The results highlight the conditions to obtain high-ablation efficiency, show how to optimize the machining quality and point out the burst duration as the relevant parameter for femtosecond GHz machining.