Integrated optic distributed Bragg reflector Fabry-Perot modulator for microwave applications

An integrated optic Fabry-Perot modulator is considered. The device, fabricated on III-V materials, uses distributed Bragg reflectors as mirrors. The greatest technical challenge in the realization of this device was the fabrication of the gratings with nanometer feature sizes. First order gratings 0.09 /spl mu/m in width and of 0.8 /spl mu/m in depth were written on a 2 /spl mu/m wide rib waveguide and successfully etched. The design, fabrication, and performance of the device is discussed. >