Progress towards achieving integrated circuit functionality using porous silicon optoelectronic components
2000
Porous silicon offers many potential advantages for the realisation of optoelectronic circuits and systems. This paper assesses some of the technologies available for the fabrication of porous silicon waveguides for visible and infrared applications. The unique physical and chemical properties of the material enable additional functionality over other silicon-based optoelectronic technologies. As an example, optical sensing of solvents and vapours is discussed using both optical waveguides and multi-layer reflector stacks.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
26
References
15
Citations
NaN
KQI