Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system

A new styled compact wavelength dispersive X-ray spectrometer for light elements analysis has been developed. This spectrometer was applied for soft X-ray detection (energy less than 1 keV) mounted on a compact high-energy ion microprobe system `mikro-i' and combined with particle-induced X-ray emission in this system. Two multilayer monochrometers, W/Si multilayer and Ni/C multilayer, settled on the compact multilayer benders for X-ray diffraction, and a gas proportional counter with a wide (150 mm X 20 mm) and thin (1 micrometers thickness) polymer film window for soft X-ray made it possible to achieve the compact dimensions of the spectrometer. This system was evaluated for K lines emitted from light elements such as boron, carbon, nitrogen and oxygen. The energy resolution less than 21 eV for each element was observed and was enough to discriminate their characteristic X-rays from disturbing ones. Also, the sensitivity was enough to analyze trace elements or microarea.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.