Super precision processing

PURPOSE: To grind and polish by one grinding device and to attempt high efficiency and low cost by carrying out specular polishing by way of using a polishing tool in place of a grinding wheel after carrying out super precision grinding initially with the grinding wheel by way of using the super precision grinding device. CONSTITUTION: By using a super precision grinding device rotating deflection of a grinding wheel head 1 and a turn table to hold a processed article 3 of which is made to be less then 0.1μm, it is started to drive by way of installing a grinding wheel 2 on the grinding wheel head 1 and is made to carry out super precision grinding up to surface roughness close to the specular surface of the processed srticle 3. Thereafter, by removing the grinding wheel 2 and installing a polishing tool on the grinding wheel head 1 in its place, specular polishing is carried out by the same method as the super precision grinding. As the polishing tool, even for a polishing grinding wheel of a grinding wheel shape containing abrasive grain for polishing the one with a sheet type polishing cloth stuck on its base plate of a polishing grinding wheel type is used, and in the case of the latter, a polishing material containing fine abrasive grain is supplied as required. COPYRIGHT: (C)1993,JPO&Japio