A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.