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Influence of ingot and wafer annealing on the homogeneity of Fe-doped semiinsulating InP wafers
Influence of ingot and wafer annealing on the homogeneity of Fe-doped semiinsulating InP wafers
2017
M. Avella
J. Jiménez
A. Alvarez
R. Fornari
E. Gilioli
M. Béjar
S.K. Krawczyk
Keywords:
Ingot
Metallurgy
Homogeneity (statistics)
Annealing (metallurgy)
Wafer
Doping
Materials science
fe doped
Correction
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