A laser beam controller and extreme ultraviolet light generation apparatus

The laser beam control device, guide laser device and a guide laser device guide laser beam wavefront adjuster disposed in the optical path of the output guide laser beams from the laser beam and the guide laser beam wavefront tuning output from the laser system a beam combiner configured to the traveling direction of the guide laser beam output from the vessel to substantially coincide with each other, both placed in the optical path of both the laser beam and the guide laser beam output from the beam combiner a beam wavefront adjuster, a beam monitor that is arranged in the optical path of both the laser beam and the guide laser beam output from both beams wavefront control, based on a detection result by the beam monitor for both the laser beam and the guide laser beam guide laser beam wavefront adjuster and the beams wavefront adjuster Te A controller configured to control, may be provided.