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Anisotropic Plasma Etching of Sputtered Zinc Oxide
Anisotropic Plasma Etching of Sputtered Zinc Oxide
1990
G. D. Swanson
Takashi Tamagawa
Dennis L. Polla
Keywords:
Anisotropy
Zinc
Plasma etching
Inorganic chemistry
Chemistry
Etching
anisotropic plasma
Correction
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