Synthesis of Diamond from a High-Velocity Microwave Plasma Flow
2020
A new method of gas-phase diamond deposition with a high-velocity jet used to transport gases activated in microwave plasma to a substrate is developed. Diamond was synthesized from a mixture of hydrogen with the addition of 1% methane. The deposition rate (78 μm/h) was more than an order of magnitude higher than that achieved earlier in experiments with activation of similar initial mixtures in microwave plasma.
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