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Micro-Electromechanical Vibrating Ring Gyroscope with Structural Mode-Matching in (100) Silicon
Micro-Electromechanical Vibrating Ring Gyroscope with Structural Mode-Matching in (100) Silicon
2018
Boo Hyun An
Waqas Amin Gill
Ji Sung Lee
SeungOh Han
Hyun Kee Chang
Aveek Nath Chatterjee
Daniel S. Choi
Keywords:
Analytical chemistry
Gyroscope
Materials science
Silicon
mode matching
Optoelectronics
Correction
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