A method for functional testing of an inertial sensor and an inertial sensor
2011
The invention relates to a method for functional testing of an inertial sensor (201, 301), wherein a first test signal (323) having a first frequency to a test electrode of the inertial sensor (201, 301) for exciting a vibration of a vibration mass (203) is fed and the oscillating mass (203) corresponding first response signal is detected, and a second test signal (325) is fed with a direction different from the first frequency second frequency to the test electrode, wherein an oscillating mass (203) corresponding second response signal is detected, and both response signals are evaluated. The invention further relates to an inertial sensor (201, 301).
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