Application of different modes of nanoscale impedance microscopy in materials research

In recent years, there is noticeable interest in application of various types of scanning probe microscopy in material science research. One of them is contact atomic force microscopy combined with local impedance measurements, known as nanoscale impedance microscopy. Literature references present its application in investigations of new materials, microelectronics diagnostics, or research of protective coatings performance. In this paper, the authors present assumptions of methodology, important modes of operation, practical aspects of measurement system, and also exemplary results of application in fields of materials’ characterization.