High resistivity silicon DRA array for millimeter-wave high gain applications

The paper presents the design, and measurement results of a new millimeter-wave Dielectric Resonator Antenna (DRA) array implemented in high resistivity Silicon Image Guide (SIG) technology. The proposed SIG antenna offers a low-cost, and high gain DRA array concept for millimeter-wave applications. The design includes a low loss SIG power splitter which has been used to feed the 4-by10 antenna array. The antenna with the feed has a measured return loss better than −10 dB within the frequency range from 90 GHz to 110 GHz. The measured gain is 19 dB at 97 GHz. The measurements data are in good agreement with the simulation results. A single mask dry etching process has been used to realize the proposed antenna. A group of narrow non-radiative supporting beams are designed to enhance the structure mechanical stability.