Fabrication of SrRuO3 powders and thin films by metalorganic decomposition

Abstract Pure SrRuO 3 powders and thin films were obtained using sol–gel synthesis from mixtures of strontium acetylacetonate and ruthenium nitrosylnitrate in 2-methoxyethanol. Fast firing conditions of xerogel (20–600°C, 600°C min −1 and then 600–800°C, 5°C min −1 ) lead to the crystallisation of pure SrRuO 3 powder. SrRuO 3 thin films were prepared by spin-coating a stable precursor solution onto (111)Si wafers and (001)SrTiO 3 single crystals. Whereas they show random orientation on Si wafers, the films are strongly (110) oriented when deposited on (001)SrTiO 3 .