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Damage-free Pattern Transfer by Low Energy Electron Enhanced Etching (LE4): Mechanisms and Applications
Damage-free Pattern Transfer by Low Energy Electron Enhanced Etching (LE4): Mechanisms and Applications
2008
H.P. Gillis
Samir Anz
Matthew Demine
Keywords:
Etching
Analytical chemistry
Electron
Materials science
low energy
Optoelectronics
Correction
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