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Electron Energy Measurement and its Control by Plasma Volume/Surface Ratio in Large Volume Reactor
Electron Energy Measurement and its Control by Plasma Volume/Surface Ratio in Large Volume Reactor
1998
K. Kinoshita
S. Noda
M. Okigawa
M. Sekine
Masami Inoue
Keywords:
Analytical chemistry
plasma volume
electron energy
Materials science
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