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Anomalous Junction Leakage Behavior of Ti-SALICIDE Contacts on Ultra-Shallow Junctions
Anomalous Junction Leakage Behavior of Ti-SALICIDE Contacts on Ultra-Shallow Junctions
1996
Atsuko Sakata
Masato Koyama
Haruko Akutsu
Iwao Kunishima
Mitsuo Koike
Mitsuhiro Tomita
Keywords:
Nanotechnology
Leakage (electronics)
Salicide
Electronic engineering
Materials science
Optoelectronics
junction leakage
Correction
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