Microelectrode for measuring EMG of laboratory animalcule and production method thereof, and measurement system for EMG of laboratory animalcule using microelectrode

2014 
The present invention relates to a micro-electrode for measuring EMG experimental fine animal. The invention of the insulating plate is deposited a metal plate on one side; The insulating plates are disposed on, and connected to the metal plate and electrically, is covered with an insulator, a plurality of the silicon substrate which are adjacent to each other; And it is formed integrally with the silicon substrate and wherein each disposed on the silicon substrate, the same group has a predetermined length to each other, and a shape gradually narrowed in the vertical direction with respect to the silicon substrate, and spaced apart by a predetermined distance from each other , is deposited a metal material is formed a metal layer, the insulator is formed on the metal layer, the tip (tip) including those wherein the metal layer a plurality of needle electrodes are exposed in part.
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