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'Smart Cut' Silicon by Proton Implantation: Lifetime Studies with a Pulsed Positron Beam
'Smart Cut' Silicon by Proton Implantation: Lifetime Studies with a Pulsed Positron Beam
2001
P. Sperr
G. Kögel
W. Bauer-Kugelmann
W. Triftshäuser
Masanori Fujinami
Keywords:
Materials science
Nuclear magnetic resonance
Smart Cut
Proton
Beam (structure)
Positron
Silicon
positron beam
proton implantation
Composite material
Optoelectronics
Correction
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