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High Efficiency p-Type PERC Solar Cells Applying PECVD ALOx Layers
High Efficiency p-Type PERC Solar Cells Applying PECVD ALOx Layers
2010
Stefan W. Glunz
R. Preu
Jochen Rentsch
M. Hofmann
Martin Hermle
Armin Richter
E. Billot
D. Kania
Jan Benick
Pierre Saint-Cast
Keywords:
Analytical chemistry
Plasma-enhanced chemical vapor deposition
Materials science
Optoelectronics
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