Surface Analysis Studies of Zr-Co Alloy and Zr-Co Alloy Films

Abstract The chemical nature of zirconium and cobalt in Zr-Co alloy and in Zr-Co films on aluminium and copper has been studied by X-ray photoelectron spectroscopy (XPS). The alloy surface of as-prepared material is characterized by Zr(IV) and Co(II) oxides. Depth profiling by Ar+ ion bombardment combined with XPS surface analysis revealed a subsurface region where the atomic concentration was Co > Zr. Further depth profiling indicated a change in the chemical nature of zirconium. Whereas the outer zirconium layer was characterized as Zr(IV), subsequent layers contained metal from the alloy. The stoichiometric composition of the alloy after removal of the oxide constituents indicated ZrCo. The preparation of alloy films was accomplished by an Ar+ ion sputter deposition method.