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A Study on Damping Constant of MEMS Inertial Sensor by Multi-Layer Metal Technology
A Study on Damping Constant of MEMS Inertial Sensor by Multi-Layer Metal Technology
2017
Toshifumi Konishi
Daisuke Yamane
Teruaki Safu
Masato Sone
Hiroshi Toshiyoshi
Kazuya Masu
Katsuyuki Machida
Keywords:
Inertial frame of reference
Electronic engineering
Microelectromechanical systems
Materials science
Metal
damping constant
multi layer
Acoustics
Correction
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