Old Web
English
Sign In
Acemap
>
Paper
>
Mass transport in thin polymer films during AFM-assisted nanolithography
Mass transport in thin polymer films during AFM-assisted nanolithography
2003
Grigorii Sigalov
Pavel B. Paramonov
Shane Juhl
Richard A. Vaia
Sergei Lyuksyutov
Keywords:
Nanotechnology
Polymer
mass transport
Atomic force microscopy
Nanolithography
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]