Low noise voltage reference for MEMS acceleration sensor readout circuit

A low noise voltage reference is designed in this paper. The voltage reference structure is realized by using a low noise bandgap reference and a low pass filter. A +/− 3.7V voltage reference chip with low noise has been fabricated in a standard CMOS 0.5µm technology. By selecting suitable feedback resistance of the amplifier, the two measured results show that the noise of voltage reference VRP is reduced from 82.16µV to 8.58µV and the noise of voltage reference VRN is reduced from 146.12µV to 9.1µV.