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Physical and mechanical properties of Ti 1 - x Si x N films
Physical and mechanical properties of Ti 1 - x Si x N films
1998
F. Vaz
L. Rebouta
Silvia Ramos
A. Cavaleiro
M.F. da Silva
Jaqueline Soares
Keywords:
Metallurgy
Materials science
Sputter deposition
Titanium
Crystallography
X-ray crystallography
High-speed steel
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