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Charge analysis of SiO 2 /Al 2 O 3 gate dielectric on (111) oriented 3C-SiC
Charge analysis of SiO 2 /Al 2 O 3 gate dielectric on (111) oriented 3C-SiC
2019
Ryusei Oka
Keisuke Yamamoto
Dong Wang
Hiroshi Nakashima
Shigeomi Hishiki
Keisuke Kawamura
Keywords:
Materials science
Optoelectronics
Gate dielectric
Semiconductor
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