Old Web
English
Sign In
Acemap
>
Paper
>
CVD of Titanium Oxide Thin Films from the Reaction of Tetrakis(dimethylamido)- titanium with Oxygen†
CVD of Titanium Oxide Thin Films from the Reaction of Tetrakis(dimethylamido)- titanium with Oxygen†
2005
Jaime B. Woods
David B. Beach
Cara L. Nygren
Zi-Ling Xue
Keywords:
Inorganic chemistry
Thin film
Titanium
Metalorganic vapour phase epitaxy
Oxygen
Materials science
Tetrakis(dimethylamido)titanium
Anatase
Titanium oxide
Crystallization
Annealing (metallurgy)
Correction
Source
Cite
Save
Machine Reading By IdeaReader
25
References
19
Citations
NaN
KQI
[]