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Development of a New Piezoelectric Galvanometer Scanner: Fabrication, Operation, and Measurements
Development of a New Piezoelectric Galvanometer Scanner: Fabrication, Operation, and Measurements
2021
Ya-Chu Chiu
Chi Ying Lin
Chien-Yu Yen
Yu-Hsi Huang
Keywords:
Galvanometer
Scanner
Materials science
Piezoelectricity
Fabrication
Optics
Correction
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