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Dislocations Analysis on Implanted (p-Type and n-Type) 4H-SiC Epi-Layer by KOH Molten Etching
Dislocations Analysis on Implanted (p-Type and n-Type) 4H-SiC Epi-Layer by KOH Molten Etching
2020
Ruggero Anzalone
Andrea Severino
Nicolò Piluso
Salvo Coffa
Keywords:
Etching
Metallurgy
Dislocation
Composite material
Materials science
Correction
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