Piezoelectric Micropump Driving Module With Programmable Slew-Rate and Dead-Time

High efficiency piezoelectric micropump driving module with programmable slew-rate and dead-time has been designed, implemented and characterized for driving custom made piezoelectric micropumps. Developed driver enables independent setting of several rectangular output signal parameters, such as frequency, positive and negative amplitudes, slew-rates, dead time, and modes of operation (pump/valve). Implemented driver can achieve amplitudes up to 250 V PP on a frequency range from DC to 1 kHz, slew-rate up to 18V/μs at maximum power consumption 1.6 W (180 mA @ 9 V). In comparison with our previous driver with RC charge/discharge signal shape, presented version increases air flow capability of micropumps from 1.6 sccm to 4.2 sccm. It enables driving of 200 μm thick PZT actuators with 12 nF capacitance.