Gallium Nitride metasurfaces: innovative perspectives and industrially relevant manufacturing processes
2018
We explore the fabrication and characterization of semiconductor based metasurfaces using gallium nitride material. Several nanofabrication approaches are discussed including free standing metasurface membranes, direct etching and sublimation of GaN metastructures to deflect and focus light at visible wavelength. We propose a new approach to compensate the effect of chromatic dispersion in refractive material with metasurfaces.
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