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Matrix Scoring Method for the Evaluation of TSV Development Using a Magnetically Enhanced Plasma Etcher
Matrix Scoring Method for the Evaluation of TSV Development Using a Magnetically Enhanced Plasma Etcher
2010
Kyounghoon P. Han
Yong-Hee Choi
Chul-Ho Shin
Sang-Sup Jeong
Sung-hee Youn
Koji Maruyama
Keywords:
Plasma etcher
Electronic engineering
Matrix (mathematics)
Materials science
Analytical chemistry
Nanotechnology
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