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Preparation of copper sulfide thin layers by a single-source MOCVD process
Preparation of copper sulfide thin layers by a single-source MOCVD process
1996
Ryoki Nomura
K. Miyawaki
T. Toyosaki
Haruo Matsuda
Keywords:
Inorganic chemistry
Thin film
Copper sulfide
Materials science
Metalorganic vapour phase epitaxy
Thin layers
Reaction mechanism
semiconductor materials
Nanotechnology
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