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Static and Dynamic VHF-Deposition of Microcrystalline Silicon at 140 MHz with Rates Up to 2.5 Nm/s
Static and Dynamic VHF-Deposition of Microcrystalline Silicon at 140 MHz with Rates Up to 2.5 Nm/s
2014
Johann W. Bartha
J. Holovsky
M. Albert
D.D. Fischer
J. Kuske
U. Merkel
S. Leszczynski
B. Leszczynska
C. Strobel
Keywords:
Microcrystalline
Solar cell
Analytical chemistry
Plasma-enhanced chemical vapor deposition
Electronic engineering
Silicon
Materials science
very high frequency
microcrystalline silicon
Optoelectronics
high rate
Deposition (law)
Correction
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