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Study on process and martial design for nanoimprint lithography based on deep learning systems
Study on process and martial design for nanoimprint lithography based on deep learning systems
2021
Sou Tsukamoto
Kai Kameyama
Hideki Tanabe
Ryuhei Yamamura
Hiroaki Kawata
Masaaki Yasuda
Yoshihiko Hirai
Keywords:
Nanoimprint lithography
Materials science
Engineering physics
Process (engineering)
Artificial intelligence
Deep learning
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