A 0.04MM 3 16NW Wireless and Batteryless Sensor System with Integrated Cortex-M0+ Processor and Optical Communication for Cellular Temperature Measurement

This paper demonstrates a complete wireless sensor node for accurate cellular temperature measurement that includes a fully programmable Cortex-M0+ processor, custom SRAM, optical energy harvesting, 2-way communication, and a subthreshold temperature sensor. The temperature resolution is 0.034°C RMS, and the transmit distance extends to 15.6cm. The 0.04mm 3 (~500× smaller than a grain of rice) fully assembled cellular temperature sensing system (CTS) is 24× smaller than prior programmable sensing systems [3], enabling implantation in a cluster of cells or large egg cells for biological studies.