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Far Back End of Line Aluminum Stress Reduction Methods for Two-Dimensional/2.5D Fine Pitch Assemblies
Far Back End of Line Aluminum Stress Reduction Methods for Two-Dimensional/2.5D Fine Pitch Assemblies
2017
Krishna Tunga
Thomas A. Wassick
Maryse Cournoyer
Keywords:
Structural engineering
Engineering
Back end of line
Finite element method
Aluminium
stress reduction
fine pitch
Correction
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