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Optimisation of Critical Parameters in a Low Cost, High Performance Deep Submicron CMOS Technology
Optimisation of Critical Parameters in a Low Cost, High Performance Deep Submicron CMOS Technology
1999
Gonçal Badenes
C. Perelló
Andreas Rupp
Ewout Vandamme
E. Augendre
Sandrine Pochet
Ludo Deferm
Keywords:
Electronic engineering
Materials science
Annealing (metallurgy)
Computer engineering
Scalability
CMOS
Silicon
Correction
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