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Manufacturing method of a stacked capacitor fin structure and a reduced fin thickness
Manufacturing method of a stacked capacitor fin structure and a reduced fin thickness
1992
Taiji Ema
Higashitani Masaaki
Toshimi Ikeda
Michiari Kawano
Hiroshi Nomura
Masaya Katayama
Masahiro Kuwamura
Keywords:
Fin
Capacitor
Materials science
Composite material
Correction
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