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An Innovative Movement Mode of Friction and Wear Tester Worktable and Its Application in CMP
An Innovative Movement Mode of Friction and Wear Tester Worktable and Its Application in CMP
2021
Zifeng Ni
Ping Zhang
Guomei Chen
Yongguang Wang
Shanhua Qian
Da Bian
Yongwu Zhao
Keywords:
Materials science
Mechanical engineering
Mode (statistics)
movement
Correction
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