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Successes and frontiers in extreme UV patterning
Successes and frontiers in extreme UV patterning
2016
Nelson Felix
Matthew E. Colburn
Karen Petrillo
Nicole Saulnier
Yongan Xu
Luciana Meli
Anuja De Silva
Indira Seshadri
Stuart A. Sieg
Derren Dunn
Keywords:
Optoelectronics
Extreme ultraviolet
Physics
Nanotechnology
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