Ultra-Compact Multichannel Optical Components Based on PLC and MEMS Technologies

Tomohiko Kanie,Makoto Katayama,Tomomi Sano,Hiroshi Kohda,Takahiro Sunaga,Manabu Shiozaki,Masato Furukawa,Hiroshi Suganuma,Kazuhito Saitoh,Masayuki Nishimura

Ultra-Compact Multichannel Optical Components Based on PLC and MEMS Technologies

2003

Tomohiko Kanie
Makoto Katayama
Tomomi Sano
Hiroshi Kohda
Takahiro Sunaga
Manabu Shiozaki
Masato Furukawa
Hiroshi Suganuma
Kazuhito Saitoh
Masayuki Nishimura

We propose multichannel optical components based on PLC and MEMS technologies. 12 channel optical switch arrays and VOA arrays have been successfully developed by integrating 2x2 cross type waveguides and MEMS micro-mirrors connected together by flip chip bonding.

Keywords:

Micro-Opto-Electro-Mechanical Systems
Optical switch
Microelectromechanical systems
Optoelectronics
Optical performance monitoring
Flip chip
Optical engineering
Optical cross-connect
Communication channel
Engineering
Electronic engineering
Waveguide

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