Novel Method for TEM Characterization of Deformation Under Nanoindents in Nanolayered Materials

Abstract Arrays of dislocations and faults have been imaged beneath wedge nanoindents in a W/NbN nanolaminate. Dislocations generated within the W layers crossed the nitride layer as a partial trailing a stacking fault. The gross deformation of the indent was accommodated by slip alone, leaving the lattice unrotated beneath the indent.