Detection of Arsenic Dopant Atoms in Silicon Crystal by Aberration Corrected Scanning Transmission Electron Microscope
2009
Keywords:
- Electrochemical scanning tunneling microscope
- Scanning electron microscope
- Scanning confocal electron microscopy
- Conventional transmission electron microscope
- Analytical chemistry
- Scanning transmission electron microscopy
- Environmental scanning electron microscope
- Electron beam-induced deposition
- Materials science
- Electron microscope
- Correction
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