A Polymer MEMS 2-Axis Scanning Mirror Driven by Magnetic Force

Light scanning device has many applications and is causing a lot of interest. Optical coherence tomography (OCT) is one example of its application in the field of biomedical imaging. With the trend of miniaturization of biomedical devices, miniaturized light scanning devices are desired for applications like compact OCT system [1].Copyright © 2008 by ASME